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Highly Sensitive CO Sensor Based on Thickness-Selective ZnO Thin Film: Device Fabrication and Packaging

Prajapati, Chandra Shekhar and Bhat, Navakanta (2019) Highly Sensitive CO Sensor Based on Thickness-Selective ZnO Thin Film: Device Fabrication and Packaging. In: CRYSTAL RESEARCH AND TECHNOLOGY, 54 (4).

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Official URL: https://dx.doi.org/10.1002/crat.201800241


In this report, the thickness-dependent carbon monooxide (CO)-sensing characteristics of sputtered zinc oxide (ZnO) films are investigated, followed by their morphological and electrical characterizations. ZnO films, approximate to 21nm, show repeatable and high change in their resistances on exposure to CO and the observed maximum response is approximate to 52.2%, whereas approximate to 219nm films fail to show reproducibility in sensing performance. Response and recovery time of approximate to 21nm films are approximate to 28 and 250s, which are faster than the time observed in case of approximate to 219nm films. An approximate to 21nm film is able to resolve 100 parts-per-billions (ppb) CO concentration in air. Later, on-chip integration of approximate to 21nm film is successfully implemented on specifically designed Micro-Electro-Mechanical-System (MEMS) platform, inbuilt with microheater and utilizes power of approximate to 23.7Milliwatts (mW) (375 degrees C). The packaged sensor chip is further tested and qualified for indoor and outdoor detection of CO gas in the atmosphere.

Item Type: Journal Article
Additional Information: The copyright for this article belongs to WILEY-V C H VERLAG GMBH
Keywords: carbon monooxide detection; packaged sensor chip; sensor fabrication; zinc Oxide thin film
Department/Centre: Division of Electrical Sciences > Electrical Communication Engineering
Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 10 Mar 2020 08:37
Last Modified: 10 Mar 2020 08:37
URI: http://eprints.iisc.ac.in/id/eprint/62798

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