Patterning Cr Film by Passing Electric Current through a Traversing Pointy Stylus: Introduction to Electrolithography and Its Prospects

Kumar, Praveen and Pratap, Rudra and Talukder, Santanu and Kumar, Sumit and Shastri, Vijayendra and Maurya, Raman and Swamy, Mruthyunjaya KB (2018) Patterning Cr Film by Passing Electric Current through a Traversing Pointy Stylus: Introduction to Electrolithography and Its Prospects. In: 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), AUG 13-17, 2018, Hangzhou, PEOPLES R CHINA, pp. 181-185.

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Abstract

Here, we introduce electrolithography, which is a recently developed lithography technique. Upon passage of electric current through a pointy cathode electrode placed on Cr film leads to formation and liquefaction of a Cr compound, which then flows away from the cathode in a radially symmetric fashion, thereby removing the Cr layer. If the pointy electrode, akin to a stylus, is traversed along a path, a trench will be patterned in the Cr film, which can then be transferred to other materials. Firstly, we describe the process of electrolithography and then we discuss the effects of the force applied on the stylus and the polymer layer placed in between substrate and Cr film on this lithography process. Finally, we discuss future prospects of electrolithography.

Item Type:	Conference Proceedings
Series.:	International Conference on Manipulation Manufacturing and Measurement on the Nanoscale
Publisher:	IEEE
Additional Information:	IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), Hangzhou, PEOPLES R CHINA, AUG 13-17, 2018
Keywords:	electrolithography; lithography; stylus-based lithography; high resolution-high throughput
Department/Centre:	Division of Mechanical Sciences > Materials Engineering (formerly Metallurgy) Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	01 Feb 2019 05:47
Last Modified:	01 Feb 2019 08:31
URI:	http://eprints.iisc.ac.in/id/eprint/61675

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