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Acoustic Transducer based on ZnO nanorods

Gaddam, Venkateswarlu and Neella, Nagarjuna and Rajanna, K and Pandi, Veera N and Nayak, M M (2017) Acoustic Transducer based on ZnO nanorods. In: 12th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS), APR 09-12, 2017, Los Angeles, CA, pp. 481-484.

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Official URL: http://dx.doi.org/ 10.1109/NEMS.2017.8017068


we report on ZnO nanorods based acoustic transducer for sound pressure level sensing applications. The sensing element is a circular diaphragm (diameter: 27 mm) of Stainless steel (SS304L) substrate, which also acts as a bottom electrode for the developed transducer. Prior to synthesis of nanorods, ZnO seed layer (similar to 100 nm) film was deposited by DC magnetron sputtering technique. ZnO nanorods were synthesized by hydrothermal method at lower temperature of 90 degrees C for 4 hrs growth duration. The average length and diameter of as-synthesized ZnO nanorods were 2 mu m and 140 nm respectively. As-synthesized nanorods were used for the fabrication of acoustic transducer. The ZnO nanorods have been sandwiched between seed layer deposited on SS substrate and top electrode of silver epoxy (thickness: similar to 200 nm). The developed transducer is used for acoustic pressure sensing at different frequencies (31.5-2000 Hz) with different sound pressure levels (SPL) in the range of 120-160 dB. The acoustic sensing study was performed using the acoustic calibrator (Model NO: MAC 1001H) set-up. It was found that, the maximum peak to peak response of the transducer was 226 mV at 1 KHz excitation frequency with the SPL of 160dB. This is the first exploratory study on the applicability of ZnO nanorods based acoustic transducer. The possible potential applications are in consumer products (telephone circuits, speech amplifiers, tape recorder and hearing aids/microphones etc.), space, medical, strategic, automotive and industrial applications.

Item Type: Conference Proceedings
Publisher: IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA
Additional Information: Copy right for the article belong to IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited: 14 Mar 2018 17:36
Last Modified: 14 Mar 2018 17:36
URI: http://eprints.iisc.ac.in/id/eprint/59195

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