Krishna, Vamsi NP and Sen, Prosenjit (2016) 3D Die Level Packaging for Hybrid Systems. In: IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC), MAY 23-26, 2016, San Jose, CA, pp. 120-122.
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Official URL: http://dx.doi.org/10.1109/IITC-AMC.2016.7507703
Abstract
The aim of this work is to develop and optimize processing technologies required for 3-D die level packaging of hybrid systems including MEMS and MOS components. In this paper we report the process development for stacking of ultra-thin silicon dies (as low as 10 mu m) and a basic 5 mu m thick MEMS device (Cantilever). SU-8 has been used as the patternable dielectric filler between the device layers.
| Item Type: | Conference Proceedings |
|---|---|
| Additional Information: | Copy right for this article belongs to the IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA |
| Department/Centre: | Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering |
| Date Deposited: | 07 Dec 2016 06:03 |
| Last Modified: | 07 Dec 2016 06:03 |
| URI: | http://eprints.iisc.ac.in/id/eprint/55565 |
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