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Photonic Crystal Based Force Sensor on Silicon Microcantilever

Sreenivasulu, T and Kolli, VR and Anusree, K and Yadunath, TR and Badrinarayana, T and Srinivas, T and Hegde, Gopalkrishna and Mohan, S (2015) Photonic Crystal Based Force Sensor on Silicon Microcantilever. In: 2015 IEEE SENSORS, NOV 01-04, 2015, Busan, SOUTH AFRICA, pp. 247-250.

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Official URL: http://dx.doi.org/10.1109/ICSENS.2015.7370225


A force sensor is designed, which consists of a Photonic Crystal (PC) ring resonator integrated on top of a 220nm thick Silicon microcantilever. The quality factor(Q) of the resonator is improved by fine tuning the size of holes inside the hexagonal ring resonator. This force sensor with high Q PC ring resonator is subjected to Finite Element Method (FEM) simulations under various forces below 1microNewton and it is found that Q remains constant for all the forces in the studied range. Since the sensor offers high Q value, it can be used to sense forces in the range of nano Newton. In this work, we have presented the force sensing characteristics of the device in the range of 0 to 1microNewton, 0.2microNewton to 0.3microNewton with increment of 10nN. The force sensitivity of the device is derived as 9.33nN for a wavelength resolution of 0.1nm. The improvement in Q of PC device is explained by using field distribution in the momentum space of the PC.

Item Type: Conference Proceedings
Series.: IEEE Sensors
Additional Information: Copy right for this article belongs to the IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA
Department/Centre: Division of Electrical Sciences > Electrical Communication Engineering
Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 22 Oct 2016 07:08
Last Modified: 22 Oct 2016 07:08
URI: http://eprints.iisc.ac.in/id/eprint/54681

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