On the Breakdown Physics of Trench-Gate Drain Extended NMOS

Tailor, Ketankumar H and Shrivastava, Mayank and Gossner, Harald and Baghini, Maryam Shojaei and Rao, Ramgopal V (2015) On the Breakdown Physics of Trench-Gate Drain Extended NMOS. In: IEEE International Conference on Electron Devices and Solid-State Circuits (EDSSC), JUN 01-04, 2015, Singapore, INDIA, pp. 804-807.

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Abstract

In this work, two drain extended NMOS (DeNMOS) devices, one with only planar gate and another with both planar gate and gate in a trench under the gate-drain overlap region (called trench-gate DeNMOS) are investigated. The latter device shows improved ON-state performance due to greater space charge control with addition of trench gate. The OFF-state breakdown physics is also compared with conventional DeNMOS device. Due to greater field spreading in the trench-gate device under OFF-state conditions, a distinct base-push effect is not observed, unlike conventional device. The oxide reliability in trench-gate device improves with an additional offset in the drift region. Therefore, the trench-gate DeNMOS can be used as an alternative to improve input/output (I/O) device performance and reliability in advanced system-on-chip (SoC) applications.

Item Type:	Conference Proceedings
Additional Information:	Copy right for this article belongs to the IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA
Department/Centre:	Division of Electrical Sciences > Electronic Systems Engineering (Formerly Centre for Electronic Design & Technology)
Date Deposited:	22 Oct 2016 05:40
Last Modified:	22 Oct 2016 05:40
URI:	http://eprints.iisc.ac.in/id/eprint/54626

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