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Optical MEMS Pressure Sensor Based on Double Ring Resonator

Dessalegn, Hailu and Srinivas, T (2013) Optical MEMS Pressure Sensor Based on Double Ring Resonator. In: International Conference on Microwave and Photonics (ICMAP), DEC 13-15, 2013, Dhanbad, INDIA.

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Official URL: http://dx.doi.org/10.1109/ICMAP.2013.6733554


This work has focused on the design, simulation and analysis of an optical MEMS pressure sensor based on serially coupled double ring resonator (DRR) in a microcantilever for pressure sensing application. The sensor is basically structured on a microcantilever beam and built-in optical integrated ring resonator which is placed in one end of the beam to gain maximum stress on the resonator. A serially coupled DRR with different radii is investigated that, effective free spectral range (FSR) of the ring is dramatically enhanced due to the vernier effect between the two rings, and the cantilever beam is optimally designed to maximize the stress and also to reduce the size and weight of the device. As a result, when pressure is applied in a system, the beam will bend, which involves mechanical deformation of the ring resonator that induces a stress, which brings the refractive index change in the waveguide lead to change in the output spectrum shift providing the measure of pressure. The sensitivity as high as 3.4149pm/kPa has been achieved and it is capable of measuring within range of (0-30.469) MPa.

Item Type: Conference Proceedings
Publisher: IEEE
Additional Information: Copy right for this article belongs to the IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA
Keywords: Double Ring Resonator; Microcantilever; Optical MEMS; Pressure Sensor; Vernier Effect
Department/Centre: Division of Electrical Sciences > Electrical Communication Engineering
Date Deposited: 24 Aug 2016 09:46
Last Modified: 24 Aug 2016 09:46
URI: http://eprints.iisc.ac.in/id/eprint/54359

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