Optimization of RF Sputtered Ag-Doped BaTiO3-CuO Mixed Oxide Thin Film as Carbon Dioxide Sensor for Environmental Pollution Monitoring Application

Rudraswamy, Shivalingappa Basavarajappa and Bhat, Navakanta (2016) Optimization of RF Sputtered Ag-Doped BaTiO3-CuO Mixed Oxide Thin Film as Carbon Dioxide Sensor for Environmental Pollution Monitoring Application. In: IEEE SENSORS JOURNAL, 16 (13). pp. 5145-5151.

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Abstract

Thin films of BaTiO3-CuO doped with Ag have been evaluated for their carbon dioxide sensing characteristics. The effect of various parameters, such as Ag doping, annealing conditions, film thickness, electrode dimensions, and operating temperature on sensitivity has been explored. The thin films in the range of 250 nm, with 1% Ag doping and no post-deposition annealing, display the best sensitivity at an optimum operating temperature of 250 degrees C. We correlate sensitivity with material characteristics as determined by X-ray diffraction, X-ray photoelectron spectroscopy, scanning electron microscope, and electron probe microscopic analysis. Sensitivity to CO2 increases with the reduction in electrode dimensions, with 500 nm electrodes giving the best sensitivity of 19% for 350 ppm and 80% for 1000 ppm of CO2. The sensor shows very low cross sensitivity to CO, NO2, and SO2.

Item Type:	Journal Article
Publication:	IEEE SENSORS JOURNAL
Publisher:	IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Additional Information:	Copy right for this article belongs to the IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 445 HOES LANE, PISCATAWAY, NJ 08855-4141 USA
Keywords:	BaTiO3-CuO; Ag; carbon dioxide; gas sensor
Department/Centre:	Division of Electrical Sciences > Electrical Communication Engineering Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	25 Aug 2016 10:19
Last Modified:	25 Aug 2016 10:19
URI:	http://eprints.iisc.ac.in/id/eprint/54319

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