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Size modulated transition in the fluid-structure interaction losses in nano mechanical beam resonators

Vishwakarma, SD and Pandey, AK and Parpia, JM and Verbridge, SS and Craighead, HG and Pratap, R (2016) Size modulated transition in the fluid-structure interaction losses in nano mechanical beam resonators. In: JOURNAL OF APPLIED PHYSICS, 119 (19).

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Official URL: http://dx.doi.org/10.1063/1.4950758


An understanding of the dominant dissipative mechanisms is crucial for the design of a high-Q doubly clamped nanobeam resonator to be operated in air. We focus on quantifying analytically the viscous losses-the squeeze film damping and drag force damping-that limit the net quality factor of a beam resonator, vibrating in its flexural fundamental mode with the surrounding fluid as air at atmospheric pressure. Specifically, drag force damping dominates at smaller beam widths and squeeze film losses dominate at larger beam widths, with no significant contribution from structural losses and acoustic radiation losses. The combined viscous losses agree well with the experimentally measured Q of the resonator over a large range of beam widths, within the limits of thin beam theory. We propose an empirical relation between the maximum quality factor and the ratio of maximum beam width to the squeeze film air gap thickness. Published by AIP Publishing.

Item Type: Journal Article
Additional Information: Copy right for this article belongs to the AMER INST PHYSICS, 1305 WALT WHITMAN RD, STE 300, MELVILLE, NY 11747-4501 USA
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 19 Jul 2016 10:00
Last Modified: 19 Jul 2016 10:00
URI: http://eprints.iisc.ac.in/id/eprint/54201

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