Sreenivasulu, T and Kolli, Venkateswara Rao and Yadunath, TR and Badrinarayana, T and Sahu, Amaresh and Hegde, Gopalkrishna and Mohan, S and Srinivas, T (2016) Photonic crystal-based force sensor to measure sub-micro newton forces over a wide range. In: CURRENT SCIENCE, 110 (10). pp. 1989-1994.
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Abstract
A photonic crystal-based force sensor to measure forces in the wide range 100 nN-10 mu N is proposed here. An optimized photonic crystal resonator integrated on top of a Si/SiO2 bilayer cantilever, is used as the sensing device. A sensitivity of 0.1 nm for a force of 100 nN is obtained with a high-quality factor of 10,000. The sensor characteristics in the force ranges 0-1 mu N and 0-10 mu N are also presented here. Linear wavelength shift and constant quality factor are observed in the entire studied force range.
Item Type: | Journal Article |
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Publication: | CURRENT SCIENCE |
Publisher: | INDIAN ACAD SCIENCES |
Additional Information: | Copy right for this article belongs to the INDIAN ACAD SCIENCES, C V RAMAN AVENUE, SADASHIVANAGAR, P B #8005, BANGALORE 560 080, INDIA |
Keywords: | Cantilever beam; force sensing; optical sensors; photonic crystal resonator |
Department/Centre: | Division of Electrical Sciences > Electrical Communication Engineering Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering |
Date Deposited: | 30 Jun 2016 05:10 |
Last Modified: | 30 Jun 2016 05:10 |
URI: | http://eprints.iisc.ac.in/id/eprint/54093 |
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