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Fabrication of Microfluidic-Nanofluidic Channels with Integrated Electrodes

Subbaiah, Nagaraj Krishna and Jeganathan, Karthick and Shiva, Anitha and Narayan, Suma Belthur and Hegde, Gopalkrishna Mahadeva and Vaswani, Sneh and Kurup, Sindhulakshmi (2016) Fabrication of Microfluidic-Nanofluidic Channels with Integrated Electrodes. In: IETE TECHNICAL REVIEW, 33 (1, SI). pp. 64-68.

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Official URL: http://dx.doi.org/10.1080/02564602.2015.1042932


We report on the fabrication of microfluidc-nanofluidic channels on Si incorporated with embedded metallic interconnects. The device aids the study of motion of dispersed particles relative to the fluid under the influence of spatially uniform electric field. Optical lithography in combination with focused ion beam technique was used to fabricate the microfluidic-nanofluidic channels, respectively. Focused ion beam technique was also used for embedding the electrodes in the nanochannel. Gold contact pads were deposited using sputtering. The substrate was finally anodically bonded to a glass substrate.

Item Type: Journal Article
Additional Information: Copy right for this article belongs to the TAYLOR & FRANCIS LTD, 4 PARK SQUARE, MILTON PARK, ABINGDON OX14 4RN, OXON, ENGLAND
Keywords: Embedded electrodes; Microfluidics; Nanofluidics
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 28 Apr 2016 05:26
Last Modified: 28 Apr 2016 05:26
URI: http://eprints.iisc.ac.in/id/eprint/53745

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