Air microjet system for non-contact force application and the actuation of micro-structures

Khare, SM and Venkataraman, V (2016) Air microjet system for non-contact force application and the actuation of micro-structures. In: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 26 (1).

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Abstract

We demonstrate a non-contact technique to apply calibrated and localized forces in the micro-Newton to milli-Newton range using an air microjet. An electromagnetically actuated diaphragm controlled by a signal generator is used to generate the air microjet. With a nozzle diameter of 150 mu m, the microjet diameter was maintained to a maximum of 1 mm at a distance of 5 mm from the nozzle. The force generated by the microjet was measured using a commercial force sensor to determine the velocity profile of the jet. Axial flow velocities of up to 25 m s(-1) were obtained at distances as long as 6 mm. The microjet exerted a force up to 1 mu N on a poly dimethyl siloxane (PDMS) micropillar (50 mu m in diameter, 157 mu m in height) and 415 mu N on a PDMS membrane (3 mm in diameter, 28 mu m thick). We also demonstrate that from a distance of 6 mm our microjet can exert a peak pressure of 187 Pa with a total force of about 84 mu N on a flat surface with 8 V operating voltage. Out of the cleanroom fabrication and robust design make this system cost effective and durable.

Item Type:	Journal Article
Publication:	JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Publisher:	IOP PUBLISHING LTD
Additional Information:	Copy right for this article belongs to the IOP PUBLISHING LTD, TEMPLE CIRCUS, TEMPLE WAY, BRISTOL BS1 6BE, ENGLAND
Keywords:	air microjet; MEMS testing; non-contact force application; nozzle flow; non-contact actuation; micro-Newton force application; pulsed jet
Department/Centre:	Division of Physical & Mathematical Sciences > Physics
Date Deposited:	14 Jan 2016 05:23
Last Modified:	14 Jan 2016 05:23
URI:	http://eprints.iisc.ac.in/id/eprint/53078

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