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A Study of Pressure-Dependent Squeeze Film Stiffness as a Resonance Modulator Using Static and Dynamic Measurements

Godthi, Vamsy and Reddy, Jayaprakash and Pratap, Rudra (2015) A Study of Pressure-Dependent Squeeze Film Stiffness as a Resonance Modulator Using Static and Dynamic Measurements. In: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 24 (6). pp. 1712-1719.

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Official URL: http://dx.doi.org/10.1109/JMEMS.2015.2431633


We report on the resonant frequency modulation of inertial microelectromechanical systems (MEMS) structures due to squeeze film stiffness over a range of working pressures. Squeeze film effects have been studied extensively, but mostly in the context of damping and Q-factor determination of dynamic MEMS structures, typically suspended over a fixed substrate with a very thin air gap. Here, we show with experimental measurements and analytical calculations how the pressure-dependent air springs (squeeze film stiffness) change the resonant frequency of an inertial MEMS structure by as much as five times. For capturing the isolated effect of the squeeze film stiffness, we first determine the static stiffness of our structure with atomic force microscope probing and then study the effect of the air spring by measuring the dynamic response of the structure, thus finding the resonant frequencies while varying the air pressure from 1 to 905 mbar. We also verify our results by analytical and Finite Element Method calculations. Our findings show that the pressure-dependent squeeze film stiffness can affect a rather huge range of frequency modulation (>400%) and, therefore, can be used as a design parameter for exploiting this effect in MEMS devices. 2014-0310]

Item Type: Journal Article
Additional Information: Copy right for this article belongs to the IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 445 HOES LANE, PISCATAWAY, NJ 08855-4141 USA
Keywords: Microelectromechanical devices; pressure effects; dynamic response; frequency modulation
Department/Centre: Division of Mechanical Sciences > Mechanical Engineering
Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 07 Jan 2016 07:44
Last Modified: 07 Jan 2016 07:44
URI: http://eprints.iisc.ac.in/id/eprint/53045

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