Spatial filter based light-sheet laser interference technique for three-dimensional nanolithography

Mohan, Kavya and Mondal, Partha Pratim (2015) Spatial filter based light-sheet laser interference technique for three-dimensional nanolithography. In: APPLIED PHYSICS LETTERS, 106 (8).

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Abstract

We propose a laser interference technique for the fabrication of 3D nano-structures. This is possible with the introduction of specialized spatial filter in a 2 pi cylindrical lens system (consists of two opposing cylindrical lens sharing a common geometrical focus). The spatial filter at the back-aperture of a cylindrical lens gives rise to multiple light-sheet patterns. Two such interfering counter-propagating light-sheet pattern result in periodic 3D nano-pillar structure. This technique overcomes the existing slow point-by-point scanning, and has the ability to pattern selectively over a large volume. The proposed technique allows large-scale fabrication of periodic structures. Computational study shows a field-of-view (patterning volume) of approximately 12: 2mm(3) with the pillar-size of 80 nm and inter-pillar separation of 180 nm. Applications are in nano-waveguides, 3D nano-electronics, photonic crystals, and optical microscopy. (C) 2015 AIP Publishing LLC.

Item Type:	Journal Article
Publication:	APPLIED PHYSICS LETTERS
Publisher:	AMER INST PHYSICS
Additional Information:	Copy right for this article belongs to the AMER INST PHYSICS, 1305 WALT WHITMAN RD, STE 300, MELVILLE, NY 11747-4501 USA
Keywords:	ILLUMINATION MICROSCOPY; PHOTONIC CRYSTALS; MOUSE-BRAIN; LITHOGRAPHY; BEAM; FABRICATION; RESOLUTION; DEFECTS; DEEP
Department/Centre:	Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	21 Apr 2015 06:44
Last Modified:	29 Oct 2018 15:32
URI:	http://eprints.iisc.ac.in/id/eprint/51305

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