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Electrothermally tunable MEMS filters

Prasad, AVSS and Venkatesh, KP and Bhat, Navakanta and Pratap, Rudra (2014) Electrothermally tunable MEMS filters. In: Conference on Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII, FEB 03-04, 2014, San Francisco, CA.

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Official URL: http://dx.doi.org/10.1117/12.2038822


MEMS resonators have potential application in the area of frequency selective devices (e.g., gyroscopes, mass sensors, etc.). In this paper, design of electro thermally tunable resonators is presented. SOIMUMPs process is used to fabricate resonators with springs (beams) and a central mass. When voltage is applied, due to joule heating, temperature of the conducting beams goes up. This results in increase of electrical resistance due to mobility degradation. Due to increase in the temperature, springs start softening and therefore the fundamental frequency decreases. So for a given structure, one can modify the original fundamental frequency by changing the applied voltage. Coupled thermal effects result in non-uniform heating. It is observed from measurements and simulations that some parts of the beam become very hot and therefore soften more. Consequently, at higher voltages, the structure (equivalent to a single resonator) behaves like coupled resonators and exhibits peak splitting. In this mode, the given resonator can be used as a band rejection filter. This process is reversible and repeatable. For the designed structure, it is experimentally shown that by varying the voltage from 1 to 16V, the resonant frequency could be changed by 28%.

Item Type: Conference Proceedings
Series.: Proceedings of SPIE
Additional Information: copyright for this article belongs to SPIE-INT SOC OPTICAL ENGINEERING, 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
Keywords: SOIMUMPs; Resonators; Fundamental Frequency; Quality Factor
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 24 Jun 2014 09:16
Last Modified: 24 Jun 2014 09:16
URI: http://eprints.iisc.ac.in/id/eprint/49338

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