Note: Design and development of an integrated three-dimensional scanner for atomic force microscopy

Rashmi, T and Dharsana, G and Sriramshankar, R and Mrinalini, Sri Muthu R and Jayanth, GR (2013) Note: Design and development of an integrated three-dimensional scanner for atomic force microscopy. In: REVIEW OF SCIENTIFIC INSTRUMENTS, 84 (11).

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Abstract

A compact scanning head for the Atomic Force Microscope (AFM) greatly enhances the portability of AFM and facilitates easy integration with other tools. This paper reports the design and development of a three-dimensional (3D) scanner integrated into an AFM micro-probe. The scanner is realized by means of a novel design for the AFM probe along with a magnetic actuation system. The integrated scanner, the actuation system, and their associated mechanical mounts are fabricated and evaluated. The experimentally calibrated actuation ranges are shown to be over 1 mu m along all the three axes. (c) 2013 AIP Publishing LLC.

Item Type:	Journal Article
Publication:	REVIEW OF SCIENTIFIC INSTRUMENTS
Publisher:	AMER INST PHYSICS
Additional Information:	Copyright for this article belongs to the AMER INST PHYSICS, USA
Department/Centre:	Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	24 Feb 2014 07:54
Last Modified:	24 Feb 2014 07:54
URI:	http://eprints.iisc.ac.in/id/eprint/48438

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