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Cantilever resonator with integrated actuation and sensing fabricated using a single step lithography

Mohanasundaram, SM and Pratap, Rudra and Ghosh, Arindam (2013) Cantilever resonator with integrated actuation and sensing fabricated using a single step lithography. In: IEEE Sensors Journal, 13 (2). pp. 440-441.

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Official URL: http://dx.doi.org/10.1109/JSEN.2012.2225045


Micro- and nano-mechanical resonators have been proposed for a variety of applications ranging from mass sensing to signal processing. Often their actuation and/or detection involve external subsystems that are much larger than the resonator itself. We have designed a simple microcantilever resonator with integrated sensor and actuator, facilitating the integration of large arrays of resonators. This unique design can be manufactured with a low-cost fabrication process, involving just a single step of lithography. The bilayer cantilever of gold and silicon dioxide is used as piezoresistive sensor as well as thermal bimorph actuator. The ac current used for actuation and the dc current used for piezoresistive detection are separated in the frequency-domain using a bias-tee circuit configuration. The resonant response is measured by detecting the second harmonic of the actuation current using a lock-in amplifier.

Item Type: Journal Article
Publication: IEEE Sensors Journal
Publisher: IEEE-Inst Electrical Electronics Engineers Inc
Additional Information: Copyright of this article belongs to IEEE-Inst Electrical Electronics Engineers Inc.
Keywords: Microelectromechanical Devices; Microresonators; Nanotechnology; Piezoresistance
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Division of Physical & Mathematical Sciences > Physics
Date Deposited: 20 Sep 2013 12:14
Last Modified: 20 Sep 2013 12:14
URI: http://eprints.iisc.ac.in/id/eprint/47229

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