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MEMS based microactuator for microjet applications

Singh, Jaspreet and Umapathi, B and Nayak, MM and Nagachenchaiah, K and Rajanna, K (2011) MEMS based microactuator for microjet applications. In: 2011 IEEE Sensors, 28-31 Oct. 2011, Limerick, Ireland.

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Official URL: http://dx.doi.org/10.1109/ICSENS.2011.6127080


The objective of this work is to confirm the possibility of utilization of PolyVinyliDeneFlouride (PVDF) films in MEMS based microactuator for microjet applications. A membrane type microactuator is designed, developed, packaged and tested. The microactuator consists of PVDF film attached to thin Silicon diaphragm. As the voltage difference is applied across it, due to the piezoelectric behaviour, it deforms primarily in d31 mode, which in turn deflects the diaphragm. Using finite element methods, coupled field analysis is carried out to optimize the dimensions of the actuator with respect to the output force and input voltage. A cavity with a square diaphragm of 1mm×1mm×5μm is realized using standard microfabrication technique. 50μm thick PVDF film, cut with special dicing saw, is glued inside the metalized cavity using low stress, conductive, room temperature cured epoxy. The 3mm×3mm×0.675mm actuator die is packaged using Chip-On-Board technique in conjunction with low temperature soldering for taking the connections. The micro-actuator is tested in both actuation and sensing mode. The developed actuator is proposed to use with micro nozzle to study the utilization in drug delivery system.

Item Type: Conference Proceedings
Publisher: IEEE
Additional Information: Copyright of this article belongs to IEEE.
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited: 02 May 2013 06:15
Last Modified: 02 May 2013 06:16
URI: http://eprints.iisc.ac.in/id/eprint/46278

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