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Nanomechanical and optical properties of highly a-axis oriented AlN films

Jose, Feby and Ramaseshan, R and Sundari, Tripura S and Dash, S and Tyagi, AK and Kiran, MSRN and Ramamurty, U (2012) Nanomechanical and optical properties of highly a-axis oriented AlN films. In: APPLIED PHYSICS LETTERS, 101 (25).

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Official URL: http://dx.doi.org/10.1063/1.4772204


This paper reports optical and nanomechanical properties of predominantly a-axis oriented AlN thin films. These films were deposited by reactive DC magnetron sputtering technique at an optimal target to substrate distance of 180 mm. X-ray rocking curve (FWHM = 52 arcsec) studies confirmed the preferred orientation. Spectroscopic ellipsometry revealed a refractive index of 1.93 at a wavelength of 546 nm. The hardness and elastic modulus of these films were 17 and 190 GPa, respectively, which are much higher than those reported earlier can be useful for piezoelectric films in bulk acoustic wave resonators. (C) 2012 American Institute of Physics. http://dx.doi.org/10.1063/1.4772204]

Item Type: Journal Article
Additional Information: Copyright for this article belongs to AMER INST PHYSICS, USA
Department/Centre: Division of Mechanical Sciences > Materials Engineering (formerly Metallurgy)
Date Deposited: 31 Jan 2013 12:47
Last Modified: 31 Jan 2013 12:47
URI: http://eprints.iisc.ac.in/id/eprint/45696

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