Synthesis and characterization of nano silicon and titanium nitride powders using atmospheric microwave plasma technique

Kumar, SMahendra and Murugan, K and Chandrasekhar, SB and Hebalkar, Neha and Krishna, M and Satyanarayana, BS and Madras, Giridhar (2012) Synthesis and characterization of nano silicon and titanium nitride powders using atmospheric microwave plasma technique. In: JOURNAL OF CHEMICAL SCIENCES, 124 (3). pp. 557-563.

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Abstract

We have demonstrated a simple, scalable and inexpensive method based on microwave plasma for synthesizing 5 to 10 g/h of nanomaterials. Luminescent nano silicon particles were synthesized by homogenous nucleation of silicon vapour produced by the radial injection of silicon tetrachloride vapour and nano titanium nitride was synthesized by using liquid titanium tetrachloride as the precursor. The synthesized nano silicon and titanium nitride powders were characterized by XRD, XPS, TEM, SEM and BET. The characterization techniques indicated that the synthesized powders were indeed crystalline nanomaterials.

Item Type:	Journal Article
Publication:	JOURNAL OF CHEMICAL SCIENCES
Publisher:	INDIAN ACAD SCIENCES
Additional Information:	Copy right for this article belongs to Indian Academy of science
Keywords:	Scalable synthesis;microwave plasma;chemical synthesis;nanoparticles
Department/Centre:	Division of Mechanical Sciences > Chemical Engineering
Date Deposited:	25 Jul 2012 10:14
Last Modified:	25 Jul 2012 10:15
URI:	http://eprints.iisc.ac.in/id/eprint/44867

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