Synthesis of free standing carbon nanosheet using electron cyclotron resonance plasma enhanced chemical vapor deposition

Thomas, Rajesh and Rao, Mohan G (2012) Synthesis of free standing carbon nanosheet using electron cyclotron resonance plasma enhanced chemical vapor deposition. In: Applied Surface Science, 258 (11). pp. 4877-4880.

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Abstract

Carbon nanosheets (CNSs) have been synthesized by electron cyclotron resonance (ECR) plasma enhanced chemical vapor deposition (PECVD) using a mixture of acetylene and argon gases on copper foil as the substrate. Micrometer-wide carbon sheets consisting of several atomic layers thick graphene sheets have been synthesized by controlled decomposition of carbon radicals in ECR-PECVD. Raman spectroscopy of these films revealed characteristics of a disordered graphitic sheet. Thick folded carbon-sheets and a semi transparent freestanding CNSs have been observed by scanning electron microscopy. This is a promising technique to synthesize free standing CNSs and can be used in the fabrication of nanoelecronic devices in future. (C) 2012 Elsevier B.V. All rights reserved.

Item Type:	Journal Article
Publication:	Applied Surface Science
Publisher:	Elsevier Science B.V.
Additional Information:	Copyright of this article belongs to Elsevier Science B.V.
Keywords:	Carbon nanosheet;Microwave-ECR plasma deposition;Electron microscopy;Infrared spectroscopy;Photoelectron spectroscopy
Department/Centre:	Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	10 Apr 2012 09:51
Last Modified:	10 Apr 2012 09:51
URI:	http://eprints.iisc.ac.in/id/eprint/44158

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