Optical, electrical and structural characterization of ZnO:Al thin films prepared by a low cost sol-gel method

Vishwas, M and Rao, Narasimha K and Phani, AR and Gowda, Arjuna KV and Chakradhar, RPS (2012) Optical, electrical and structural characterization of ZnO:Al thin films prepared by a low cost sol-gel method. In: Solid State Communications, 152 (4). pp. 324-327.

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Abstract

ZnO:Al thin films were prepared on glass and silicon substrates by the sol-gel spin coating method. The x-ray diffraction (XRD) results showed that a polycrystalline phase with a hexagonal structure appeared after annealing at 400 degrees C for 1 h. The transmittance increased from 91 to about 93% from pure ZnO films to ZnO film doped with 1 wt% Al and then decreased for 2 wt% Al. The optical band gap energy increased as the doping concentration was increased from 0.5 wt% to 1 wt% Al. The metal oxide semiconductor (MOS) capacitors were fabricated using ZnO films deposited on silicon (100) substrates and electrical properties such as current versus voltage (I-V) and capacitance versus voltage (C-V) characteristics were studied. The electrical resistivity decreased and the leakage current increased with an increase of annealing temperature. The dielectric constant was found to be 3.12 measured at 1 MHz. The dissipation value for the film annealed at 300 degrees C was found to be 3.1 at 5 V. (C) 2011 Elsevier Ltd. All rights reserved.

Item Type:	Journal Article
Publication:	Solid State Communications
Publisher:	Elsevier Science
Additional Information:	Copyright of this article belongs to Elsevier Science.
Keywords:	ZnO:Al;Sol-gel;Optical properties;Electrical properties
Department/Centre:	Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	22 Mar 2012 05:02
Last Modified:	22 Mar 2012 05:02
URI:	http://eprints.iisc.ac.in/id/eprint/44025

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