Pattnaik, Prasant Kumar and Badrinarayana, T and Srinivas, T (2006) Analysis and design of Mach-Zehnder interferometric micro-opto-electro-mechanical (MOEM) vibration Sensor. In: National Conference on Smart Structures and MEMS for Aerospace Applications MEMS 2006, , November 2006, Hyderabad.
Full text not available from this repository. (Request a copy)Item Type: | Conference Paper |
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Department/Centre: | Division of Electrical Sciences > Electrical Communication Engineering |
Date Deposited: | 10 Nov 2011 05:11 |
Last Modified: | 10 Nov 2011 05:11 |
URI: | http://eprints.iisc.ac.in/id/eprint/41994 |
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