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Experimental and Computational Studies on the Effect of Complex Air Gap Geometry on Squeeze-film Damping in Perforated MEMS Devices

Venkatesh, KP and Mohite, SS and Pandey, AK and Pratap, R (2008) Experimental and Computational Studies on the Effect of Complex Air Gap Geometry on Squeeze-film Damping in Perforated MEMS Devices. In: International Conference on Smart Materials, Structures and Systems, Indian Institute of Science, Bangalore, IISc Bangalore.

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Item Type: Conference Paper
Department/Centre: Division of Mechanical Sciences > Mechanical Engineering
Date Deposited: 11 Oct 2011 07:06
Last Modified: 11 Oct 2011 07:06
URI: http://eprints.iisc.ac.in/id/eprint/41087

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