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Structural characterization of DC magnetron-sputtered TiO2 thin films using XRD and Raman scattering studies

Karunagaran, B and Kumar, Rajendra TR and Kumar, Senthil V and Mangalaraj, D and Narayandass, SK and Rao, Mohan G (2003) Structural characterization of DC magnetron-sputtered TiO2 thin films using XRD and Raman scattering studies. In: Materials Science in Semiconductor Processing, 6 (5-6). pp. 547-550.

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Official URL: http://dx.doi.org/10.1016/j.mssp.2003.05.012


Titanium dioxide films have been deposited using DC magnetron sputtering technique onto well-cleaned p-silicon substrates at an oxygen partial pressure of 7 x 10(-5) mbar and at a sputtering pressure (Ar + O-2) Of I X 10(-3) mbar. The deposited films were calcinated at 673 and 773 K. The composition of the films as analyzed using Auger electron spectroscopy reveals the stoichiometry with an 0 and Ti ratio 2.08. The influence of post-deposition annealing at 673 and 773 K on the structural properties of the titanium dioxide thin films have been studied using XRD and Raman scattering. The structure of the films deposited at the ambient was found to be amorphous and the films annealed at temperature 673 K and above were crystalline with anatase structure. The lattice constants, grain size, microstrain and the dislocation density of the film are calculated and correlated with annealing temperature. The Raman scattering study was performed on the as-deposited and annealed samples and the existence of Raman active modes A(1g), B-1g and E-g corresponding to the Raman shifts are studied and reported. The improvement of crystallinity of the TiO2 films was also studied using Raman scattering studies. (C) 2003 Elsevier Ltd. All rights reserved.

Item Type: Journal Article
Publication: Materials Science in Semiconductor Processing
Publisher: Elsevier Science
Additional Information: Copyright of this article belongs to Elsevier Science.
Keywords: Titanium dioxide thin film;DCmagnetro n sputtering;Raman scattering
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited: 24 Aug 2011 06:38
Last Modified: 24 Aug 2011 06:38
URI: http://eprints.iisc.ac.in/id/eprint/40213

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