Rao, Narasimha K (2002) Preparation of transparent conductive oxide films by activated reactive evaporation. In: Optical Engineering, 41 (11). pp. 2705-2706.
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Indium-tin oxide films have been deposited by reactive electron beam evaporation of ln+Sn alloy both in neutral and ionized oxygen environments. A low-energy ion source (fabricated in-house) has been used. Films deposited with neutral oxygen exhibited very low optical transmittance (5% at 550 nm). Highly transparent (85%) and low-resistivity (5 X 10(-4) Omega cm) films have been deposited in ionized oxygen at ambient substrate temperature. Optical and electrical properties of the films have been studied as a function of deposition parameters. (C) 2002 Society of Photo-Optical Instrumentation Engineers.
| Item Type: | Journal Article |
|---|---|
| Publication: | Optical Engineering |
| Publisher: | The International Society for Optical Engineering |
| Additional Information: | Copyright of this article belongs to The International Society for Optical Engineering. |
| Department/Centre: | Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics |
| Date Deposited: | 22 Jul 2011 09:28 |
| Last Modified: | 22 Jul 2011 09:28 |
| URI: | http://eprints.iisc.ac.in/id/eprint/39362 |
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