Thermal analysis of metalorganic complexes of copper for evaluation as CVD precursors

Devi, Anjana and Shivashankar, SA (1999) Thermal analysis of metalorganic complexes of copper for evaluation as CVD precursors. In: Journal of Thermal Analysis and Calorimetry, 55 (1). pp. 259-270.

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Abstract

Metalorganic complexes of copper have been synthesized by modifying the ligand in the beta-diketonate class of compounds. Detailed thermal analysis of several beta-diketonate complexes of copper has been carried out to evaluate their suitability as precursors for chemical vapor deposition (CVD). A comparison of their relative volatilities has been made by determining their sublimation rates at different temperatures. Thermal analyses of these complexes reveal significant differences among their volatilities and decomposition patterns.

Item Type:	Journal Article
Publication:	Journal of Thermal Analysis and Calorimetry
Publisher:	Springer
Additional Information:	Copyright of this article belongs to Springer.
Keywords:	CVD;metalorganic precursors;thermogravimetry
Department/Centre:	Division of Chemical Sciences > Materials Research Centre
Date Deposited:	02 Jul 2011 04:44
Last Modified:	02 Jul 2011 04:45
URI:	http://eprints.iisc.ac.in/id/eprint/38862

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