Tantalum oxide films prepared by unbalanced reactive magnetron sputtering

Rao, Rama N and Chandramani, R and Rao, Mohan G (1999) Tantalum oxide films prepared by unbalanced reactive magnetron sputtering. In: Journal of Materials Science Letters, 18 (23). pp. 1949-1951.

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Item Type:	Journal Article
Publication:	Journal of Materials Science Letters
Publisher:	Springer
Additional Information:	Copyright of this article belongs to Springer.
Department/Centre:	Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	02 Jul 2011 06:08
Last Modified:	02 Jul 2011 06:08
URI:	http://eprints.iisc.ac.in/id/eprint/38839

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