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Sputtered thin-film strain gauges for differential pressure measurement

Nayak, MM and Rajanna, K and Gunasekaran, N and Muthunayagam, AE and Mohan, S and Ram, KM (1996) Sputtered thin-film strain gauges for differential pressure measurement. In: Transactions on Instrumentation and Measurement, 45 (1). pp. 335-339.

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A differential pressure transducer with sputtered gold films as strain gauges has been designed and fabricated. The construction details of the sensing element assembly are given. The details of the strain gauge film configuration employed and the thin-film deposition process are also presented. Information on the output characteristics of the differential pressure transducer such as effect of pressure cycles on output, thermal stability, bidirectional calibration results obtained and individual gauge stability is reported.

Item Type: Journal Article
Publication: Transactions on Instrumentation and Measurement
Publisher: IEEE
Additional Information: Copyright 1996 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 13 May 2011 06:59
Last Modified: 06 Nov 2018 12:16
URI: http://eprints.iisc.ac.in/id/eprint/37553

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