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Sputter deposited LiPON thin films from powder target as electrolyte for thin film battery applications

Nimisha, CS and Rao, Yellareswar K and Venkatesh, G and Rao, Mohan G and Munichandraiah, N (2011) Sputter deposited LiPON thin films from powder target as electrolyte for thin film battery applications. In: Thin Solid Films, 519 (10). pp. 3401-3406.

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Official URL: http://dx.doi.org/10.1016/j.tsf.2011.01.087


Lithium phosphorus oxynitride (LiPON) thin films as solid electrolytes were prepared by reactive radio frequency (rf) magnetron sputtering from Li3PO4 powder compact target. High deposition rates and ease of manufacturing powder target compared with conventional ceramic Li3PO4 targets offer flexibility in handling and reduce the cost associated. Rf power density varied from 1.7 Wcm(-2) to 3 Wcm(-2) and N-2 flow from 10 to 30 sccm for a fixed substrate to target distance of 4 cm for best ionic conductivity. The surface chemical analysis done by X-ray photoelectron spectroscopy showed incorporation of nitrogen into the film as both triply, NE and doubly. Nd coordinated form. With increased presence of NE, ionic conductivity of LiPON was found to be increasing. The electrochemical impedance spectroscopy of LiPON films confirmed an ionic conductivity of 1.1 x 10(-6) Scm(-1) for optimum rf power and N-2 flow conditions. (C) 2011 Elsevier B.V. All rights reserved.

Item Type: Journal Article
Publication: Thin Solid Films
Publisher: Elsevier Science B.V.
Additional Information: Copyright of this article belongs to Elsevier Science B.V.
Keywords: Powder target;Solid electrolyte;LiPON thin films;X-ray photoelectron spectroscopy
Department/Centre: Division of Chemical Sciences > Inorganic & Physical Chemistry
Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited: 26 Apr 2011 08:05
Last Modified: 26 Apr 2011 08:05
URI: http://eprints.iisc.ac.in/id/eprint/37141

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