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Synthesis and properties of zirconia thin films

Suhail, MH and Krishna, Ghanashyam M and Rao, Mohan G and Mohan, S (1994) Synthesis and properties of zirconia thin films. In: Bulletin of Materials Science, 17 (6). pp. 855-862.

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Thin films of zirconia have been synthesized using reactive DC magnetron sputtering. It has been found that films with good optical constants, high refractive index (1.9 at 600 nm) and low extinction coefficient can be prepared al ambient temperatures. The optical constants and band gnp and hence the composition nle dependent on the deposition parameters such as target power, rate of deposition and oxygen background pressure. Thermal annealing of the films revealed that tile films showed optical and crystalline inhomogeneity and also large variations in optical constants.

Item Type: Journal Article
Publication: Bulletin of Materials Science
Publisher: Indian academy of sciences
Additional Information: Copyright of this artical belongs to Indian academy of sciences.
Keywords: Magnetron sputtering;zirconia.
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited: 13 Apr 2011 09:52
Last Modified: 13 Apr 2011 09:52
URI: http://eprints.iisc.ac.in/id/eprint/36855

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