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Study of electrical properties of pulsed excimer laser deposited strontium titanate films

Rao, Mohan G and Krupanidhi, SB (1994) Study of electrical properties of pulsed excimer laser deposited strontium titanate films. In: Journal of Applied Physics, 75 (5). pp. 2604-2610.

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Polycrystalline SrTiO3 films were prepared by pulsed excimer laser ablation on Si and Pt coated Si substrates. Several growth parameters were varied including ablation fluence, pressure, and substrate temperature. The structural studies indicated the presence of [100] and [110] oriented growth after annealing by rapid thermal annealing at 600-degrees-C for 60 s. Deposition at either lower pressures or at higher energy densities encouraged film growth with slightly preferred orientation. The scanning electron microscopy studies showed the absence of any significant particulates on the film surface. Dielectric studies indicated a dielectric constant of 225, a capacitance density of 3.2 fF/mum2, and a charge density of 40 fC/mum for films of 1000 nm thick. The dc conductivity studies on these films suggested a bulk limited space charge conduction in the high field regime, while the low electric fields induced an ohmic conduction. Brief time dependent dielectric breakdown studies on these films, under a field of 250 kV/cm for 2 h, did not exhibit any breakdown, indicating good dielectric strength.

Item Type: Journal Article
Publication: Journal of Applied Physics
Publisher: American institute of physics
Additional Information: Copyright of this article belongs to American institute of physics.
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited: 13 Apr 2011 06:08
Last Modified: 26 Oct 2018 07:47
URI: http://eprints.iisc.ac.in/id/eprint/36844

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