Phani, Arindam (2010) A Non-contact measurement technique to measure micro surface stress and obtain deformation profiles of the order of 1nm in Micro-cantilever based structures by single image Optical Diffraction method. In: Conference on Photonics North 2010, JUN 01-03, 2010, Niagara Falls, CANADA.
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A new method based on analysis of a single diffraction pattern is proposed to measure deflections in micro-cantilever (MC) based sensor probes, achieving typical deflection resolutions of 1nm and surface stress changes of 50 mu N/m. The proposed method employs a double MC structure where the deflection of one of the micro-cantilevers relative to the other due to surface stress changes results in a linear shift of intensity maxima of the Fraunhofer diffraction pattern of the transilluminated MC. Measurement of such shifts in the intensity maxima of a particular order along the length of the structure can be done to an accuracy of 0.01mm leading to the proposed sensitivity of deflection measurement in a typical microcantilever. This method can overcome the fundamental measurement sensitivity limit set by diffraction and pointing stability of laser beam in the widely used Optical Beam Deflection method (OBDM).
| Item Type: | Conference Paper |
|---|---|
| Series.: | Proceedings of SPIE-The International Society for Optical Engineering |
| Publisher: | The International Society for Optical Engineering |
| Additional Information: | Copyright of this article belongs to The International Society for Optical Engineering. |
| Keywords: | Micro-cantilever based sensors; Surface Stress; Optical Diffraction |
| Department/Centre: | Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics |
| Date Deposited: | 31 Mar 2011 07:06 |
| Last Modified: | 31 Mar 2011 07:06 |
| URI: | http://eprints.iisc.ac.in/id/eprint/36360 |
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