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Diaphragm-type sputtered platinum thin film strain gauge pressure transducer

Nayak, MM and Gunasekaran, N and Muthunayagam, AE and Rajanna, K and Mohan, S (1993) Diaphragm-type sputtered platinum thin film strain gauge pressure transducer. In: Measurement Science and Technology, 4 (12). pp. 1319-1322.

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A diaphragm-type pressure transducer with a sputtered platinum film strain gauge (sensing film) has been designed and fabricated. The various steps followed to prepare thin film strain gauges on the diaphragm are described. M-bond 450 adhesive (Measurements Group, USA) has been employed as the insulating layer. A detailed procedure to cure this layer is given. A d.c. sputtering method is employed to prepare the platinum films. This paper also includes details of the strain gauge pattern and its location on the diaphragm. A description of the output characteristics and overall behaviour of the platinum thin film pressure transducer is reported.

Item Type: Journal Article
Publication: Measurement Science and Technology
Publisher: Institute of Physics
Additional Information: Copyright of this article belongs to Institute of Physics.
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 10 Feb 2011 07:58
Last Modified: 06 Nov 2018 12:18
URI: http://eprints.iisc.ac.in/id/eprint/35397

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