Synthesis of carbon nanotubes by ECR plasma-assisted chemical vapor deposition

Patra, SK and Rao, Mohan G (2005) Synthesis of carbon nanotubes by ECR plasma-assisted chemical vapor deposition. In: Applied Physics A: Materials Science & Processing, 80 (5). pp. 1113-1115.

Preview

PDF A117.pdf Download (276kB)

Abstract

Carbon nanotubes have been grown using an electron cyclotron resonance(ECR) plasma source at a substrate temperature of 500 degrees C.Methane has been used as the source gas. A network of carbon nanotubes has been observed in scanning electron microscopy. Transmission electron microscopy revealed that the structure consists of straight,Y-junction and ring-like nanotubes. Further, electron diffraction of the nanotubes confirms a graphite crystal structure.

Item Type:	Journal Article
Publication:	Applied Physics A: Materials Science & Processing
Publisher:	Springer
Additional Information:	Copyright for this article belongs to Springer.
Department/Centre:	Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	12 Aug 2005
Last Modified:	19 Sep 2010 04:19
URI:	http://eprints.iisc.ac.in/id/eprint/3510

Actions (login required)

View Item