Ramprasad, BS and Radha, TS (1979) On the uniformity of film thickness on rotating spherical substrates on a planar work holder. In: Thin Solid Films, 56 (3). pp. 363-367.
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Official URL: http://dx.doi.org/10.1016/0040-6090(79)90139-1
Abstract
Curves for the uniformity in film thickness on spherical substrates are drawn for various geometries. The optimum source-to-substrate height for maximum uniformity of the film thickness is determined. These data are approximated to achieve uniform thickness on a large number of small planar substrates loaded on a large spherical substrate holder, the appropriate geometry being selected on the basis of the radius of curvature of the substrate holder.
| Item Type: | Journal Article |
|---|---|
| Publication: | Thin Solid Films |
| Publisher: | Elsevier Science |
| Additional Information: | Copyright of this article belongs to Elsevier Science. |
| Department/Centre: | Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics |
| Date Deposited: | 28 Dec 2010 05:56 |
| Last Modified: | 28 Dec 2010 05:56 |
| URI: | http://eprints.iisc.ac.in/id/eprint/33784 |
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