Nanomechanical properties of silicon surfaces nanostructured by excimer laser

Kumar, Prashant and Kiran, MSRN (2010) Nanomechanical properties of silicon surfaces nanostructured by excimer laser. In: Science and Technology of Advanced Materials, 11 (2).

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Abstract

Excimer laser irradiation at ambient temperature has been employed to produce nanostructured silicon surfaces. Nanoindentation was used to investigate the nanomechanical properties of the deformed surfaces as a function of laser parameters, such as the angle of incidence and number of laser pulses at a fixed laser fluence of 5 J cm(-2). A single-crystal silicon 311] surface was severely damaged by laser irradiation and became nanocrystalline with an enhanced porosity. The resulting laser-treated surface consisted of nanometer-sized particles. The pore size was controlled by adjusting the angle of incidence and the number of laser pulses, and varied from nanometers to microns. The extent of nanocrystallinity was large for the surfaces irradiated at a small angle of incidence and by a high number of pulses, as confirmed by x-ray diffraction and Raman spectroscopy. The angle of incidence had a stronger effect on the structure and nanomechanical properties than the number of laser pulses.

Item Type:	Journal Article
Publication:	Science and Technology of Advanced Materials
Publisher:	Institute of Physics and National Institute of Materials Science
Additional Information:	Copyright of this article belongs to Institute of Physics and National Institute of Materials Science.
Keywords:	excimer laser; nanostructuring; nanocrystallinity; nanoindentation
Department/Centre:	Division of Mechanical Sciences > Materials Engineering (formerly Metallurgy)
Date Deposited:	11 Nov 2010 10:45
Last Modified:	11 Nov 2010 10:45
URI:	http://eprints.iisc.ac.in/id/eprint/33641

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