Direct Writing of Copper Film Patterns by Laser-Induced Decomposition of Copper Acetate

Harish, CM and Kumar, V and Prabhakar, A (1988) Direct Writing of Copper Film Patterns by Laser-Induced Decomposition of Copper Acetate. In: Journal of the Electrochemical Society, 135 (11). 2903 -2904.

PDF Direct_Writing_of_Copper.pdf - Published Version Restricted to Registered users only Download (454kB) | Request a copy

Abstract

Direct writing of patterns is being widely attempted in the field of microelectronic circuit/device manufacture. Use of this technique eliminates the need for employing photolithographic process. Laser induced direct writing can be achieved by (i) Photochemical reaction [i] , (ii) Evaporation from target material [2], and (iii) decomposition.Micron size features of palladium and copper through decomposition of palladium acetate and copper formate respectively on quartz and silicon using Argon ion laser have been reported [3,4] .In this commuication we report a technique for both single line and large area depositon of copper through decomposition of copper acetate,(CH3COO)2Cu, on alumina substrates.Nd:YAG laser known for its reliability and low maintenance cost as compared to excimer and other gas lasers is used. This technique offers an attractive and economical alternative for manufacture of thin film microcircuits.

Item Type:	Editorials/Short Communications
Publication:	Journal of the Electrochemical Society
Publisher:	The Electrochemical Society
Additional Information:	Copyright of this article belongs to the Electrochemical Society.
Keywords:	Electroplating,copper compounds,oxygen compounds,films, decomposition,laser beam applications,alumina,substrates.
Department/Centre:	Division of Physical & Mathematical Sciences > Physics
Date Deposited:	08 Sep 2010 06:53
Last Modified:	19 Sep 2010 06:16
URI:	http://eprints.iisc.ac.in/id/eprint/32087

Actions (login required)

View Item