Reliability analysis of torsional varactor

Venkatesh, C and Bhat, Navakanta (2007) Reliability analysis of torsional varactor. In: 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits, JUL 11-13, 2007, Bangalore.

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Abstract

A torsional MEMS varactor with wide dynamic range, lower actuation voltage and isolation between actuation voltage and signal voltage has been proposed in C. Venkatesh et al. (2005). In this paper we address the effects of pull-in, residual stress and continuous cycling on the performance of torsional MEMS varactor.

Item Type:	Conference Paper
Publisher:	IEEE
Additional Information:	Copyright 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Department/Centre:	Division of Electrical Sciences > Electrical Communication Engineering
Date Deposited:	19 May 2010 07:02
Last Modified:	19 Sep 2010 06:00
URI:	http://eprints.iisc.ac.in/id/eprint/27152

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