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Reliability Analysis of Torsional MEMS Varactor

Venkatesh, C and Bhat, N (2008) Reliability Analysis of Torsional MEMS Varactor. In: IEEE Transactions on Device and Materials Reliability, 8 (1). pp. 129-134.

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This paper discusses reliability issues in torsional MEMS varactor. Self-actuation due to high ac signals is analyzed, and solutions are proposed. The mode of failure at high actuation voltages is analyzed and established through experiments. Issues like stiction due to high voltages and effect of high residual stress are studied experimentally.

Item Type: Journal Article
Publication: IEEE Transactions on Device and Materials Reliability
Publisher: IEEE
Additional Information: Copyright 2008 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Department/Centre: Division of Electrical Sciences > Electrical Communication Engineering
Date Deposited: 30 Mar 2010 09:24
Last Modified: 19 Sep 2010 05:58
URI: http://eprints.iisc.ac.in/id/eprint/26696

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