Highly stable oscillator for quartz crystal thickness monitor

Shivalingappa, L and Srinivasan, MP and Mohan, S (1991) Highly stable oscillator for quartz crystal thickness monitor. In: Vacuum, 42 (3). pp. 203-204.

PDF high.pdf - Published Version Restricted to Registered users only Download (150kB) | Request a copy

Abstract

A highly stable oscillator used in a quartz crystal thickness monitor for monitoring the rate of evaporation and total thickness of film during thin film deposition is reported. The design aspects of the oscillator and its long term stability, which enhances the reproducibility and the performance of the thickness monitor, are discussed. The stability of the oscillator at defined conditions is tested and compared with the conventional transistorized oscillator and the IC oscillator using inverters. The oscillator is coupled to the crystal monitor and its performance is studied in an evaporation system by evaporating different materials

Item Type:	Journal Article
Publication:	Vacuum
Publisher:	Elsevier
Additional Information:	copyright belongs to Elsevier Science
Department/Centre:	Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	18 Jan 2010 08:43
Last Modified:	19 Sep 2010 05:54
URI:	http://eprints.iisc.ac.in/id/eprint/25386

Actions (login required)

View Item