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Thermo-mechanical characterization of surface-micromachined microheaters using in-line digital holography

Jayaraman, Balaji and Singh, Vijay Raj and Asundi, Anand and Bhat, Navakanta and Hegde, Gopalkrishna M (2010) Thermo-mechanical characterization of surface-micromachined microheaters using in-line digital holography. In: Measurement Science and Technology, 21 (1).

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This paper describes the application of lensless in-line digital holographic microscopy (DHM) to carry out thermo-mechanical characterization of microheaters fabricated through PolyMUMPs three-layer polysilicon surface micromachining process and subjected to a high thermal load. The mechanical deformation of the microheaters on the electrothermal excitation due to thermal stress is analyzed. The numerically reconstructed holographic images of the microheaters clearly indicate the regions under high stress. A double-exposure method has been used to obtain the quantitative measurements of the deformations, from the phase analysis of the hologram fringes. The measured deformations correlate well with the theoretical values predicted by a thermo-mechanical analytical model. The results show that lensless in-line DHM with Fourier analysis is an effective method for evaluating the thermo-mechanical characteristics of MEMS components.

Item Type: Journal Article
Publication: Measurement Science and Technology
Publisher: Institute of Physics
Additional Information: copyright of this article belongs to Institute of Physics.
Keywords: digital in-line holographic microscopy;lensless digital holography;double exposure;microheater;thermo-mechanical characterization.
Department/Centre: Division of Mechanical Sciences > Aerospace Engineering(Formerly Aeronautical Engineering)
Division of Electrical Sciences > Electrical Communication Engineering
Date Deposited: 09 Jan 2010 09:58
Last Modified: 19 Sep 2010 05:54
URI: http://eprints.iisc.ac.in/id/eprint/25304

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