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Some properties of indium-tin oxide-films

Radhakrishna, MC and Rao, M Ramakrishna (1977) Some properties of indium-tin oxide-films. In: Paramana, 9 (1). pp. 1-6.

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Thin films of indium-tin oxide have been deposited by DC diode sputtering from an indium-tin alloy target in an argon, hydrogen and oxygen atmosphere. Films with sheet resistance of 11 ohms/square and 80% light transmission have been obtained. The effect of cathode composition and gas mixture on sheet resistance and optical transmission properties of the films have been studied.

Item Type: Journal Article
Publication: Paramana
Publisher: Indian Academy of Sciences
Additional Information: Copyright of this article belongs to Indian academy of sciences.
Keywords: Indium;tin oxide films;optical properties of thin films;reactive evaporation.
Department/Centre: Division of Biological Sciences > Biochemistry
Date Deposited: 04 Feb 2010 06:52
Last Modified: 25 Oct 2018 06:56
URI: http://eprints.iisc.ac.in/id/eprint/24479

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