Ramprasad, BS and Radha, TS (1974) On uniformity of film thickness on rotating substrates having a large source-to-substrate height. In: Thin Solid Films, 20 (2). S47-S48.
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Abstract
Abstract is not available.
| Item Type: | Journal Article |
|---|---|
| Publication: | Thin Solid Films |
| Publisher: | Elsevier Science |
| Additional Information: | Copyright of this article belongs to Elsevier Science. |
| Department/Centre: | Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics |
| Date Deposited: | 31 Dec 2009 10:25 |
| Last Modified: | 19 Sep 2010 05:45 |
| URI: | http://eprints.iisc.ac.in/id/eprint/23355 |
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