A Microcomputer-Based Novel Deposition Controller for Preparing Films with Graded Composition

Shivalingappa, L and Rao, Narasimha K and Mohan, S (2000) A Microcomputer-Based Novel Deposition Controller for Preparing Films with Graded Composition. In: IEEE Transactions on Industry Applications, 36 (3). pp. 928-934.

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Abstract

A novel microcomputer-based electron beam (EB) deposition technique has been developed for preparing thin films with graded composition. A conventional EB gun crucible has been modified to accommodate two constituent materials, Necessary electronic hardware and a software-based INTEL 8085 microcomputer have been built to provide the crucible rotation with the required speed and for changing the emission currents for the EB gun. Mixed oxide films of CeO2 and SiO2 with composition varying along their thicknesses have been prepared. The composition gradation has been altered by varying the deposition rate and rotational speed of individual constituents. The atomic percentages of Ce, Si, and O have been computed from deposition parameters and correlated with the data obtained from Auger spectroscopy.

Item Type:	Journal Article
Publication:	IEEE Transactions on Industry Applications
Publisher:	IEEE
Additional Information:	©2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Keywords:	Graded composite films;novel deposition controller
Department/Centre:	Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	25 Aug 2008
Last Modified:	19 Sep 2010 04:15
URI:	http://eprints.iisc.ac.in/id/eprint/1780

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