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Powered automatic measuring system for Langmuir probe plasma analysis

Sreenivasulu, M and Patra, SK and Rao, Mohan G (2001) Powered automatic measuring system for Langmuir probe plasma analysis. In: Review of Scientific Instruments, 72 (11). pp. 4312-4314.

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Langmuir probe analysis of a sputtering glow discharge leads to errors in measurements due to contamination of the probe surface by the sputter deposition from the target. An automatic Langmuir probe system using a personal computer has been designed. The design details and performance evaluation of this system are discussed in this article.

Item Type: Journal Article
Publication: Review of Scientific Instruments
Publisher: American Institute of Physics
Additional Information: Copyright of this article belongs to American Institute of Physics.
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited: 26 Sep 2008 09:00
Last Modified: 19 Sep 2010 04:50
URI: http://eprints.iisc.ac.in/id/eprint/16041

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