Thin-film pressure transducer with manganese film as the strain gauge

Rajanna, K and Mohan, S and Nayak, MM and Gunasekaran, N (1990) Thin-film pressure transducer with manganese film as the strain gauge. In: Sensors and Actuators A: Physical, 24 (1). pp. 35-39.

PDF Thin-film_pressure_transducer_with_manganese_film_as_the_strain_gauge.pdf Restricted to Registered users only Download (412kB) | Request a copy

Abstract

The performance of a thin-film pressure transducer with manganese film as the strain gauge is presented. The construction details of the pressure transducer diaphragm assembly are given. The process of depositing the insulating layers, sensing film, bonding pads, the protective overlayer, film stabilization and other related aspects are also described. Results on the output characteristics of the pressure transducer are reported.

Item Type:	Journal Article
Publication:	Sensors and Actuators A: Physical
Publisher:	Elsevier Sequoia
Additional Information:	Copyright of this article belongs to Elsevier Sequoia
Keywords:	pressure transducer
Department/Centre:	Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	20 Dec 2007
Last Modified:	19 Sep 2010 04:41
URI:	http://eprints.iisc.ac.in/id/eprint/12560

Actions (login required)

View Item