Gas sensing properties of undoped and antimony doped tin oxide films prepared by spray pyrolysis and electron beam evaporation method

Shamala, KS and Murthy, LCS and Rao, Narasimha K (2006) Gas sensing properties of undoped and antimony doped tin oxide films prepared by spray pyrolysis and electron beam evaporation method. In: Indian Journal of Pure & Applied Physics, 44 (11). pp. 867-870.

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Abstract

The thin films of undoped and antimony doped tin oxide films were prepared oil glass substrates by spray pyrolysis and electron beam evaporation techniques. The Substrate temperature was varied between 300 and 370 degrees C in case of spray pyrolysis and 200 degrees C in case of electron beam evaporation. The films were tested as gas sensors in the presence of liquid petroleum gas (LPG) and compressed natural gas (CNG). Undoped and antimony doped tin oxide films prepared by spray pyrolysis were more sensitive to LPG. Sensitivity of spray deposited ATO film in the presence of 1000 PPM of LPG was found to be 0.86 at an operating temperature of 400 degrees C and it was 0.23 for undoped film. Undoped tin oxide films prepared by electron beam evaporation showed a maximum sensitivity of 0.79 at all operating temperature of 375 degrees C oil its exposure to 1000 PPM of LPG. The performance of the sensor has been explained on the basis of the structure and conduction mechanism of the tin oxide film.

Item Type:	Journal Article
Publication:	Indian Journal of Pure & Applied Physics
Publisher:	National Institute of Science Communication and Information Resources
Additional Information:	Copyright of this article belongs to National Institute of Science Communication and Information Resources.
Department/Centre:	Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	14 Jan 2008
Last Modified:	02 May 2011 06:45
URI:	http://eprints.iisc.ac.in/id/eprint/11355

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