Selvarajan, A and Pattnaik, PK and Gupta, VM and Srinivas, T (2000) Micro-opto-electro-mechanical (MOEM) vibration sensor. In: Smart Structures and Materials 2000: Smart Electronics and MEMS, 6-8 March 2000, Newport Beach, CA, USA, pp. 78-85.
Full text not available from this repository. (Request a copy)Abstract
The combination of Integrated Optics with micro-mechanical structures on silicon offers immense potential for smart structure applications. One such application is sensing and mapping of vibration and vibrational modes. In the present proposal, a cantilever formed by bulk micro machining of <100>. Silicon and optical waveguides formed by sol-gel process is considered. Among the various configurations possible, an optical directional coupler located close to foot of the cantilever is analyzed in detail. Analytical and simulation result using optical coupled mode theory to obtain the power transfer that is dependent on cantilever vibrations are presented.
| Item Type: | Conference Paper |
|---|---|
| Publisher: | SPIE - The International Society for Optical Engineering |
| Additional Information: | Copyright of this article belongs to SPIE - The International Society for Optical Engineering |
| Keywords: | coupled mode analysis;intelligent sensors;micro optics;microsensors;optical directional couplers;optical sensors;vibration measurement |
| Department/Centre: | Division of Electrical Sciences > Electrical Communication Engineering |
| Date Deposited: | 08 Aug 2007 |
| Last Modified: | 27 Aug 2008 12:44 |
| URI: | http://eprints.iisc.ac.in/id/eprint/10424 |
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