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Noise analysis and a comparative study of noise in MEMS and MOEMS

Selvarajan, Ananth and Anand, SK (1999) Noise analysis and a comparative study of noise in MEMS and MOEMS. In: SPIE:Smart Structures and Materials 1999: Smart Electronics and MEMS, 1-3 March 1999, Newport Beach, CA, USA, Vol.3673, 113-120.

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In recent years Micro Electro Mechanical Systems (MEMS) and Micro Opto Electro Mechanical Systems (MOEMS) have grown in importance, especially in smart structure applications. In this paper a theoretical comparative study is made analyzing three different types of micro pressure sensors. MEMS type pressure sensors of the piezo-resistive and capacitive type are considered along with MOEM pressure sensor of the Fabry-Perot interferometric type. It is found that piezo resistive and capacitive pressure sensors in the micro form attain improved noise performance as compared to their bulk counterparts. The opto-mechanical sensors shows better noise performance than the capacitive sensor, when the limiting noise is due to Brownian motion.

Item Type: Conference Paper
Publisher: SPIE -International Society for Optical Engineering
Additional Information: Copyright of this article belongs to SPIE - International Society for Optical Engineering.
Department/Centre: Division of Electrical Sciences > Electrical Communication Engineering
Date Deposited: 28 May 2007
Last Modified: 27 Aug 2008 12:43
URI: http://eprints.iisc.ac.in/id/eprint/10295

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